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IAE 고등기술연구원 : Institute for Advanced Engineering
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Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with on-machine measurement
저자명_  Ho-Sang Kim, Kwang-Il Lee, Kyoung-Min Lee, Young-Bong Bang
Fabrication of free-form surfaces that are frequently demanded for the construction of optical imaging systems is described. To obtain a tool motion with large amplitude and high bandwidth, a novel long-stroke fast tool servo is proposed and installed on the Z-axis of a diamond turning machine as an additional synchronized axis. In addition, a special on-machine measurement device is used to measure the optical parameters of the machined surface and to compensate for the residual form errors that are commonly produced in the diamond turning process. Actual machining test results show that the proposed procedures are capable of generating the copper free-form mirrors of 50 mm diameter to a form accuracy of 0.15 m in peak-to-valley value error.   Key words: Long-stroke fast tool servo, diamond turning, free-form surface, on-machine measurement, corrective figuring.
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Feed-forward control of fast tool servo for real-time correction of spindle error in diamond turning of flat surfaces
저자명_  Ho-Sang Kim and Eui-Jung Kim
We describe a fast tool servo designed and tested to obtain sub-micrometer form accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a fast tool servo driven by a piezoelectric actuator along with a capacitive displacement sensor. To overcome the inherent non-linearity of the piezoelectric actuator, Proportional Integral (PI) feedback control with a notch filter is implemented. Besides, feed-forward control based on a simple feed-forward predictor is added to achieve better tracking performance. Actual machining data are discussed in detail to prove that the proposed fast tool servo is capable of fabricating flat aluminum specimens of 100 mm in diameter to a form accuracy of 0.10 m in peak-to-valley error value.   Key words: Fast tool servo, diamond turning, real-time error compensation, feed-forward control, piezoelectric actuator.
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Diamond turning of large off-axis aspheric mirrors using a fast tool servo with on-machine measurement
저자명_  Ho-Sang Kim, Eui-Jung Kim and Byung-Suk Song
We describe a systematic approach of diamond turning which has been devised to fabricate large aspheric off-axis mirrors demanded for the construction of three-mirror-anastigmatic telescopes. To obtain sub-micrometer form accuracy, the machine axes errors are compensated for real time using a fast tool servo driven by a piezoelectric actuator along with an on-machine measurement scheme. Besides, a special chucking device is used to mount the mirror substrate on the spindle with a required large offset to the axis of rotation, which has been specially designed to minimize elastic deformation caused by centrifugal inertia and clamping force. Actual machining data are discussed in detail to prove that the proposed approach is capable of fabricating aluminum mirrors of 620 mm diameter to a form accuracy of 0.7 m in peak-to-valley error value.   Key words: Diamond turning, large off-axis aspheric mirrors, real-time error compensation, fast tool servo, on-machine measurement, three-mirror-anastigmatic telescopes.
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