고등기술연구원

장비현황

Institute for Advanced Engineering

장비현황

INSTITUTE FOR ADVANCED ENGINEERING

지능기계시스템센터
LASER Interferometer (HP 5529A)

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  • 특징
    제조회사 : Hewlett Packard
    주요용도 : Machine Calibration
    Linear error-0.025㎚, 0.175㎧; Angle-0.05arcsec/m; Straightness-0.01㎛
    Air &Material temperature compensation
    Material temp. sensor(3ea)
    Air sensor(1ea)
    Tripod for LASER head(1ea)
    Hand cart(1ea)

  • 규격

  • 담당자